HIGH FREQUENCY MAGNETIC THIN FILM, COMPOSITE MAGNETIC THIN FILM, AND MAGNETIC ELEMENT USING THE COMPOSITE MAGNETIC THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a high frequency magnetic thin film or the like having high permeability, high saturation magnetization and high resistivity in a high frequency region of a GHz band.;SOLUTION: A high frequency magnetic thin film 1 having both high permeability and high saturation magnetization is obtained by combining a T-L composition layer 5 comprising a T-L composition (T=Fe or FeCo, L=one kind or two or more kinds of C, B and N) and a Co system noncrystalline alloy layer 3 disposed in one surface side of the T-L composition layer 5. In addition to the T-L composition layer 5 and the Co system noncrystalline alloy layer 3, a high resistance layer 7 is formed showing higher electric resistance than the T-L composition layer 5, and the Co system noncrystalline alloy layer 3. Consequently, the high frequency magnetic thin film 1 which has both high permeability and high saturation magnetization and shows high resistivity is obtained.;COPYRIGHT: (C)2004,JPO&NCIPI