首页> 外国专利> EVALUATING METHOD AND SYSTEM FOR ELECTROOPTICAL CRYSTAL OR MAGNETOOPTICAL CRYSTAL, TERAHERTZ LIGHT MEASURING METHOD AND SYSTEM THEREFOR

EVALUATING METHOD AND SYSTEM FOR ELECTROOPTICAL CRYSTAL OR MAGNETOOPTICAL CRYSTAL, TERAHERTZ LIGHT MEASURING METHOD AND SYSTEM THEREFOR

机译:光电晶体或磁光晶体的评估方法和系统,太赫兹光测量方法和系统

摘要

PROBLEM TO BE SOLVED: To make an electrooptical crystal or the like able to be properly evaluated.;SOLUTION: A bias voltage is appied from a voltage applying part 13 on a light conduction antenna 9, and pump pulse light is irradiated, thereby terahertz light generates from the light conduction antenna 9. The terahertz pulse light is irradiated onto a two-dimensional region of an electrooptical crystal 17 of an evaluated object. Probe pulse light polarized with a polarizer 22 is irradiated onto the two-dimensional region of the crystal 17. A two-dimensional CCD camera 24 images a two-dimensional light intensity distribution image of the probe pulse light passing the two-dimensional region of the crystal 17. Image signals are obtained from the camera 24 at each bias voltage while changing the bias voltage. Detection efficiency and a residual birefringence rate of the crystal 17 and each distribution of influence of scattering of the probe pulse light are evaluated from the relation of the bias voltage and the image signal every pixel.;COPYRIGHT: (C)2004,JPO
机译:解决的问题:为了能够正确地评估电光晶体等;解决方案:从电压施加部分13在光导天线9上施加偏置电压,并且照射泵浦脉冲光,从而太赫兹光太赫兹脉冲光从导光天线9产生。太赫兹脉冲光照射到被评价物的电光晶体17的二维区域。用偏振器22偏振的探测脉冲光被照射到晶体17的二维区域上。二维CCD照相机24对穿过激光的二维区域的探测脉冲光的二维光强度分布图像成像。晶体17。在改变偏压的同时,在每个偏压下从照相机24获得图像信号。根据每个像素的偏置电压和图像信号的关系,评估晶体17的检测效率和残余双折射率以及探测脉冲光的散射影响的每种分布。;版权:(C)2004,JPO

著录项

  • 公开/公告号JP2004020504A

    专利类型

  • 公开/公告日2004-01-22

    原文格式PDF

  • 申请/专利权人 TOCHIGI NIKON CORP;NIKON CORP;

    申请/专利号JP20020179324

  • 发明设计人 USAMI MAMORU;

    申请日2002-06-20

  • 分类号G01M11/00;G01N21/35;

  • 国家 JP

  • 入库时间 2022-08-21 23:32:07

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