VACUUM CHAMBER WITH GAS ANALYZER, BAKING METHOD OF VACUUM CHAMBER WITH GAS ANALYZER, AND ANALYSIS METHOD OF RESIDUAL GAS IN VACUUM CHAMBER WITH GAS ANALYZER

摘要

PROBLEM TO BE SOLVED: To provide a vacuum chamber with a gas analyzer provided with a quadruple mass spectrometer for measuring under high temperature conditions without deteriorating the sensitivity and to provide a baking method of the vacuum chamber with the gas analyzer and an analysis method of the residual gas in the vacuum chamber with the gas analyzer.;SOLUTION: An ion source part, a quadrupole part and a detecting part are inserted in a flange of the vacuum chamber 18, the vacuum chamber inside is hermetically sealed by a hermetical seal connection part 17, and a control part 14, the hermetical seal connection part 17 and an analyzer tube are connected together by a signal cable 16. A cooling block 44 is closely attached surrounding the outer circumferential part of the connection part between the flange of the vacuum chamber 18 and the hermeticaly sealed connection part 17, its inside is disposed with a cooling pipe, and a cooling medium is introduced therein. Even if the vacuum chamber 18 is heated by a baking panel 46, the connection part is locally cooled by the cooling block 44 so as to be measured even under the high temperature conditions.;COPYRIGHT: (C)2005,JPO&NCIPI