OPTICAL CHARACTERISTICS REGULATING METHOD FOR OPTICAL THIN-FILM ELEMENT FOR WAVELENGTH SELECTION AND OPTICAL THIN-FILM ELEMENT FOR WAVELENGTH SELECTION PRODUCED USING THE METHOD

摘要

PROBLEM TO BE SOLVED: To suppress the occurrence of defective by repairing specifications of even substandard products to be within the specifications.;SOLUTION: In an optical thin film element in which an optical thin film for wavelength selection is film-formed on a substrate and an antireflection film is film-formed on at least one among an optical thin-film upper surface and a substrate rear surface, the antireflection film is made to have layer structure containing a graded-refractive index film. Thereby the antireflection film of optional film thickness can be constituted by selecting graded-refractive index of the graded-refractive index film. Furthermore, the antireflection film of required film thickness is film-formed and thereby required warping is given to the optical thin film. Thus, optical characteristics of the optical thin film is regulated.;COPYRIGHT: (C)2004,JPO