DISTILLATION AND REGENERATION TREATMENT APPARATUS FOR RECOVERED COOLING MEDIUM FLUOROCARBON, AND DISTILLATION AND REGENERATION TREATMENT METHOD

摘要

PPROBLEM TO BE SOLVED: To separate and resover cooling medium fluorocarbon of high quality by removing impurities mixedly exist in a recovered cooling medium by distillation. PSOLUTION: The distillation and regeneration treatment apparatus X is provided parallel a high temperature chamber 1 for housing a recovered cooling medium container 7 and a low temperature chamber 2 for housing a filling empty container 8 and constituted so that a distillation pipeline 9, which connects the respective containers in a separable manner, is arranged and the recovered cooling medium fluorocarbon evaporated in the high temperature chamber 1 is introduced into the filling empty container 8 through the distillation pipeline 9 to be lequified and recovered. Herein, a heat pump 3 is interposed between the high and low temperature chambers 1 and 2 to arrange a cooler 4, a heater 5 and a condenser 6 to adjust and keep a high and low temperature difference to 20-30C. Further, the distillation pipeline 9 introduced into the low temperature chamber 2 to be branched to arrange the vacuum pump 11 arranged outdoors through an on-off valve and a branched pipeline 10 connected to the recovery chamber 12. Pretreatment for reducing the pressure in the distillation pipeline 9 and post treatment for separately recovering residual fluorocarbon in the distillation pipeline 9 are performed. PCOPYRIGHT: (C)2004,JPO