CLEANING FLUID DISTILLATION AND REGENERATION APPARATUS, COMPONENT CLEANING EQUIPMENT, AND DISTILLATION AND REGENERATING METHOD OF CLEANING FLUID

摘要

PROBLEM TO BE SOLVED: To provide a cleaning fluid distillation and regeneration apparatus which can adjust a moisture concentration in a cleaning fluid, component cleaning equipment, and a distillation and regeneration method of cleaning fluid.SOLUTION: A cleaning fluid distillation and regeneration apparatus comprises: a distillation pot which vaporizes a cleaning fluid containing moisture; an adjustment mechanism which condenses and adjusts the vapor of the vaporized cleaning fluid; a moisture replenishment mechanism which replenishes the inside of the adjustment mechanism with moisture; and a control device which performs control for replenishing the inside of the adjustment mechanism of the moisture replenishment mechanism with the moisture. The adjustment mechanism comprises: a condenser which condenses and liquefies vapor of the cleaning fluid which has been vaporized by the distillation pot; and a tank which stores the liquefied cleaning fluid. The moisture replenishment mechanism is connected to the condenser, and the control device executes control for replenishing the cleaning fluid of a pressure-reduced state in the condenser with the moisture from the moisture replenishment mechanism, in the case when a moisture concentration of the cleaning fluid which is introduced into the distillation pot or a moisture concentration of the distillated cleaning fluid is lower than a prescribed value.SELECTED DRAWING: Figure 2