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Thin film production manner and its application in the special substrate
Thin film production manner and its application in the special substrate
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机译:薄膜的生产方式及其在特殊基材上的应用
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摘要
Portion and the component of process step and the addition formation where this invention, in order at least to embrittle part 2 locally at least one component 6, in regard to the production manner of the thin film 8 which installs 6A and 6B, the addition formation forms 2 which is formed, 3 and 4 in substrate, 1 consists of the material where differ from the substrate and the embrittlement possible part, and/or at least in embrittlement step and the addition formation which generate the preparation step and brittle sublayer 5 which possesses the micro structure which differs in this embrittlement possible part one component 6, forms 6A and 6BIn order to obtain the thin film 8 which is installed, the embrittlement possible part, includes with the separable step which is detached according to brittle sublayer.
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