ORGANOTITANIUM COMPOUND, SOLUTION RAW MATERIAL CONTAINING THE SAME AND TITANIUM-CONTAINING DIELECTRIC THIN FILM PREPARED THEREFROM

摘要

PROBLEM TO BE SOLVED: To obtain an organotitanium compound having a high solubility in an organic solvent, capable of obtaining a high film-forming rate, and excellent in heat stability and vaporization stability, and a solution raw material containing the organotitanium compound, and to prepare a titanium-containing dielectric thin film having good step coverage.;SOLUTION: The organotitanium compound is represented by formula (1) [wherein R is a 4-10C straight-chain or branched alkyl group; L is a β diketone residue represented by formula (2) (wherein R¹ is an alkyl group or an aryl group; R² is an alkyl group)].;COPYRIGHT: (C)2004,JPO