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ORGANOTITANIUM COMPOUND, SOLUTION RAW MATERIAL CONTAINING THE SAME AND TITANIUM-CONTAINING DIELECTRIC THIN FILM PREPARED THEREFROM
ORGANOTITANIUM COMPOUND, SOLUTION RAW MATERIAL CONTAINING THE SAME AND TITANIUM-CONTAINING DIELECTRIC THIN FILM PREPARED THEREFROM
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机译:制备相同的有机钛化合物溶液和含钛的电介质薄膜
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摘要
PROBLEM TO BE SOLVED: To obtain an organotitanium compound having a high solubility in an organic solvent, capable of obtaining a high film-forming rate and excellent in heat stability and vaporization stability, and a solution raw material containing the organotitanium compound.;SOLUTION: The organotitanium compound is represented by formula (1) [wherein O-i-Pr as a binding group is an isopropoxide group represented by formula (2); L is a β diketone residue represented by formula (3) (wherein R1 is an alkyl group or an aryl group; R2 is an alkyl group)].;COPYRIGHT: (C)2004,JPO
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机译:解决的问题:获得在有机溶剂中具有高溶解度,能够获得高的成膜速率并且具有优异的热稳定性和汽化稳定性的有机钛化合物,以及包含该有机钛化合物的溶液原料。有机钛化合物由式(1)表示[其中,作为结合基的Oi-Pr是由式(2)表示的异丙氧基。 L是β式(3)表示的二酮残基(其中R 1 Sup>是烷基或芳基; R 2 Sup>是烷基)]。版权所有:(C) 2004年
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