Method of manufacturing a field emission electron source array, field emission electron source array, and the manufacturing equipment

摘要

PROBLEM TO BE SOLVED: To provide the manufacturing method of a field-emission-type electron- source array suitable for a thin-type display, a field-emission-type electron-source array and its manufacturing device, and a separation and purification method of carbon nanotube. SOLUTION: A conductive substrate 26, an conductive material layer 25 containing at least carbon nanotubes, an insulation substrate 23 having plural minute routes passing through the inside and outside, and an conductive substrate 21 having an insulation film 22 on the surface are laminated. By applying optimal alternative voltage between the conductive substrate 21 and the conductive substrate 26, qualified carbon nanotubes suitable to a field-emission-type electron source move into the minute routes passing through the inside and outside of the insulation substrate 23, while repeating minute expansion and contraction. The minute routes are filled with carbon nanotubes, and an oriented insulation substrate 23 is produced.