POSITION DETERMINATION METHOD OF MEASURING OBJECT IN ELECTRON MICROSCOPE, AND ELECTRON MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a position determination method capable of easily determining the position of a measuring object in electron microscope observation from position information or the like of the measuring object acquired by observation by a first microscope such as an optical microscope, a phase contrast microscope, a differential interference microscope or a polarization microscope.;SOLUTION: In this position determination method of the measuring object, when performing same-field observation of the measuring object on a substrate by the first microscope and the electron microscope, the coordinate of the measuring object in the electron microscope is determined based on the coordinates of two points on the measuring object and the substrate in the first microscope and the coordinates of two points on the substrate in the electron microscope.;COPYRIGHT: (C)2004,JPO&NCIPI