METHOD FOR MEASURING CONCENTRATION OF HYDROGEN CHLORIDE IN MIXED GAS CONTAINING HYDROGEN CHLORIDE

摘要

PROBLEM TO BE SOLVED: To provide a method for measuring the concentration of an inorganic compound in a mixed gas containing hydrogen chloride by a simple operation without any deterioration by the corrosion of measuring equipment, and for measuring the concentration of the inorganic compound in the mixed gas containing hydrogen chloride being extremely advantageous from the point of view of the cost of the measuring equipment and operability.;SOLUTION: The method for measuring the concentration of the inorganic compound in the mixed gas for containing the hydrogen chloride includes the first and second processes. In the first process, the concentration of the hydrogen chloride in the mixed gas containing the hydrogen chloride is reduced to 1 vol.% or less to measure the amount of hydrogen chloride. In the second process, the amount of gas, where the concentration of the hydrogen chloride obtained in the first process is equal to or less than 1 vol.%, and the concentration of the inorganic compound in the gas are measured.;COPYRIGHT: (C)2004,JPO