首页>
外国专利>
WAVE FRONT ABERRATION MEASURING METHOD, WAVE FRONT ABERRATION MEASURING DEVICE, MANUFACTURING METHOD OF IMAGING OPTICAL SYSTEM AND MANUFACTURING METHOD OF EXPOSURE DEVICE
WAVE FRONT ABERRATION MEASURING METHOD, WAVE FRONT ABERRATION MEASURING DEVICE, MANUFACTURING METHOD OF IMAGING OPTICAL SYSTEM AND MANUFACTURING METHOD OF EXPOSURE DEVICE
展开▼
机译:波前像差测量方法,波前像差测量设备,成像光学系统的制造方法和曝光设备的制造方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
PROBLEM TO BE SOLVED: To provide a measuring method of wave front aberration wherein the whole wave front is not modulated due to a position measurement error of a part of a spot.;SOLUTION: A spherical wave SW outputted from a floodlighting optical system 12 is converted into parallel beams PB by a relay lens 14 through a pinhole in a first plane 13 of this wave front aberration measuring device 11 provided on the imaging position of the floodlighting optical system 12. The parallel beams PB enter a micro-lens array 16 formed by arranging many micro-lenses two-dimensionally. The parallel beams PB are imaged by each micro-lens as secondary images on an imaging element (CCD) 17 arranged on a prescribed position. When measuring the imaging position by the imaging element and operating the wave front aberration therefrom, data satisfying a specific standard among data of the variation of a spot position are removed, and the wave front aberration is measured based on the residual data.;COPYRIGHT: (C)2004,JPO
展开▼