TARGET OF X-RAY GENERATING APPARATUS, MANUFACTURING METHOD OF TARGET OF X-RAY GENERATING APPARATUS, AND X-RAY GENERATING APPARATUS

摘要

PROBLEM TO BE SOLVED: To manufacture a target without a practical problem using lanthanoid as a material.;SOLUTION: The manufacturing method of the target of the X-ray apparatus comprises processes (P2, P3) of ramming down a mixture material of boride of lanthanoid such as LaB₆, and a material with a higher coefficient of thermal conductivity than the boride of lanthanoid such as copper by putting it in a die, a process (P5) of heating the rammed-down mixture material in an isotropic pressurization state, and a process (P6) of processing the mixture material heated in the isotropic pressurization state in a shape of a target. If the die is set in a circular shape, a rotor target can be manufactured. Since a mixture of LaB₆ and copper is used, peel-off or damage of the surface layer of the target can be prevented for a long period of time as compared with the case of using an LaB₆ single body.;COPYRIGHT: (C)2004,JPO