Manufacturing method of optical micro actuator and an optical element using the micro-actuator and optical micro actuator

摘要

The present invention, there is an optical micro actuator, is (30) cavity formed between (14,14a, 14b) of the optical output channels (12,12a, 12b) and the optical input channels cavity with, are those that can accommodate (32, 34, 35) a second optical fluid and such first are different from each other at least one optical property (30); first and second It is equipped with; for displacing with respect to the optical channel, the position of the interface between the fluid and the optical means. In the present invention, the interface position displacing unit, electrostatic, which can vary chambers and one (40, 41, 43), the volume of the chamber at least to accommodate the fluid in fluid communication with the cavity for (30) and a control means, and (44,46,80).