OIL-FREE ELECTRON BEAM SUPPLY SOURCE HAVING CATHODE, AND ANODE MEMBERS ADJUSTABLE WITH FIVE DEGREES OF FREEDOM

摘要

PPROBLEM TO BE SOLVED: To provide an oil-free electron supply source, having a cathode that is easy to work exchanging and alignment, also that can be easily disassembled and reassembled. PSOLUTION: An insulated receptacle (102) is mounted inside a vacuum chamber (152). A coordinate system, having an electron beam axial line (82) and a horizontal direction plane which crosses the electron beam axial line (82), is defined by using a receptacle-mounting flange (122). An adaptor (186) is adjustable for five degrees of freedom with respect to the coordinate system. The cathode (149), and a bundle electrode (132) adjustable at least with four degrees of freedom are aligned to each other, before being mounted to the adaptor. An anode (90) is aligned at a predetermined distance in relation to the coordinate system. PCOPYRIGHT: (C)2004,JPO