FABRICATING PROCESS AND APPARATUS FOR ATTACHING OXIDE SUPERCONDUCTIVE THIN FILM WITH BUFFER LAYER TO SAPPHIRE SUBSTRATE

摘要

PPROBLEM TO BE SOLVED: To provide a fabricating process and an apparatus for attaching an oxide superconductive thin film with a buffer to a sapphire substrate in which the superconductive thin film with rectangular and methodical grain boundary is formed. PSOLUTION: There is provided a fabricating process for attaching an oxide superconductive thin film with a buffer to a sapphire substrate, wherein a first buffer layer 2 comprising CeOSB2/SBis formed on an R surface sapphire substrate 1, and then a second buffer layer 3 comprising SmSB2(1-x)/SBGdSB2x/SBOSB3/SB(0x1) and next the superconductive thin film 4 is formed. PCOPYRIGHT: (C)2004,JPO