COPOLYMER FILM, ITS FORMING METHOD, SEMICONDUCTOR DEVICE USING THE COPOLYMER FILM, AND POLYMER-FILM GROWING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an organic polymer film having a low dielectric constant and excellent adhesion, and a semiconductor device having a multilayer wiring structure using the same.;SOLUTION: A mixed gas containing a gas of a first organic monomer having at least two or more of a cyclobutene structure and a gas of a second organic monomer which is an alicyclic hydrocarbon having at least two or more of a double bond, is sprayed, in a reaction chamber kept under reduced pressure, on a surface of a substrate that is placed in the reaction chamber and is heated, to grow a copolymer film by carrying out a polymerization reaction between the first organic monomer molecules and the second organic monomer molecules on the substrate surface.;COPYRIGHT: (C)2004,JPO