SEMICONDUCTOR COMPONENT MANUFACTURING PLANT WITH VENTILATED FALSE FLOOR

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor component manufacturing plant making it possible to integrate at least part of a vacuum pump transport line in an intermediate space situated between a support slab and the false floor of a clean room.;SOLUTION: The semiconductor component manufacturing plant is constructed in a building having an upper story 1 and a lower story 6 separated from one another by the support slab 3 and the false floor 2. The support slab 3 has passageway openings 8 while the false floor 2 consists of plates themselves having through passages 7. Vacuum generation means 4 are disposed in the intermediate space 2c situated between the support slab 3 and the false floor 2. Suction means 9 situated in the lower story 6 create a gaseous flow 5 directed downwards from the clean room 1 through the intermediate space 2c to the lower story 6. In this way, the false floor 2 acts as a non-return mechanism for noise, thermal or chemical pollution coming from the vacuum generation means 4.;COPYRIGHT: (C)2004,JPO