Production manner of the vibrating film of semiconductor electret electrostatic microphone, the semiconductor electret electrostatic microphone null which uses the vibrating film and this vibrating

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a diaphragm of a semiconductive electret-condenser microphone having excellent productivity.;SOLUTION: The manufacturing method comprises a process forming a mask 200 exposing a part equal to a diaphragm 500 to be formed on a surface 110 of a mother board 100 capable of etching, a process plating with a non- spreading metal film 300 becoming the diaphragm 500 on a part 111 equal to the diaphragm 500, a process clearing the board 100 of a plated part of the film 300 by etching from non plated rear side, and a process fitting a ring 400 to a cleared part 121 by etching from a rear side 120 of the board 100 so as to connect the ring 400 to the film 300 and also separating the film 300 as the diaphragm 500 from the board 100.;COPYRIGHT: (C)2002,JPO