RESOLUTION EVALUATION METHOD OF ELECTRON MICROSCOPE, AND ADJUSTING METHOD OF ELECTRON MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To evaluate the performance of a scanning electron microscope without using visual sensory evaluation to reduce aging effect and a performance difference between individuals of the scanning electron microscope.;SOLUTION: A cross section of a thin film layer of which the dimensions are previously known is processed into a mirror finished surface, image data of a scanning electron microscope image is obtained, and thereafter the performance evaluation of the scanning electron microscope is stably and quantitatively executed by using a means such as a frequency analysis or the like.;COPYRIGHT: (C)2004,JPO