A method of manufacturing the same, as well as integrated spectrometer for measurement of high-speed and high-speed communication, and in particular the integrated spectrometer has a high spectral resolution

摘要

The present invention relates to a method of manufacturing the same, as well as integrated spectrometer for measurement of high-speed and high-speed communication, especially with have a high spectral resolution. Spectrometer according to the present invention is provided with a basic spectrometer at least one, with has a (12) micro-guide assembly, it is formed in a flat guide on which is cleaved, the basic spectrometer, optical a specific phase array; reflecting means with a view to the embodiment of performing a plurality of times in free space propagation of light from the micro-guide assembly, can be reflected sequentially light from the micro-guide assembly (24, 30, and 32, 34); photodetection means for optically detecting light reflected in this manner (26); focusing means for focusing the light to the optical detection means on this and (28) ; I is equipped with a.