SAMPLE FOR MEASURING TWO-DIMENSIONAL CARRIER DISTRIBUTION, METHOD OF MANUFACTURING THE SAME AND METHOD FOR EVALUATING TWO-DIMENSIONAL CARRIER DISTRIBUTION

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a sample suitable for evaluating two-dimensional carrier distribution by a scanning probe microscope, wherein the sample is used for measuring the two-dimensional carrier distribution.;SOLUTION: The method of manufacturing the sample for measuring two-dimensional carrier distribution comprises a first process of depositing a thin film of thickness 1 μm or layer on a substrate where a measurement object region is formed, a second process of bonding a dummy wafer on the thin film, a third process of cutting the substrate at a right angle relative to its surface so as to make the cross section of the measurement object region exposed, and a fourth process of mirror-polishing the cut surface of the wafer.;COPYRIGHT: (C)2004,JPO