TARGET FOR GENERATING LIGHT HAVING EXTREMELY SHORT WAVELENGTH, LIGHT GENERATING METHOD USING TARGET, AND DEVICE THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a target having a high radiation conversion efficiency, a highly clean target, a generation method of light having an extremely short wavelength using the target, and a device therefor, without wasting much input laser light energy.;SOLUTION: This generation device of light having an extremely short wavelength is characterized by being equipped with a hopper 4 having a discharge port capable of discharging frost to one side, a refrigerator 1 for cooling the hopper to an extremely low temperature, a heater 3 capable of heating the wall face of the hopper intermittently, and a vacuum chamber 7 for keeping the periphery of the hopper vacuum, provided on one side with a first window 10 for guiding a laser beam from the outside to the periphery of an outlet, and on the other side with a second window 11 for taking out extreme ultraviolet rays. The light having an extremely short wavelength is generated by the generation device by using as the target the frost F having a density which is 1/100-1/2 of the solid density.;COPYRIGHT: (C)2004,JPO