IMPURITY RECOVERY METHOD AND IMPURITY RECOVERY DEVICE FOR LOCAL TRACE CHEMICAL ANALYSIS

摘要

PROBLEM TO BE SOLVED: To solve problems in a conventional analysis, in which a semiconductor board is prone to contamination because of use of a micropipet and manual operation for fixing a local analysis mask to the semiconductor board, a gap due to use of a fixing holder simplified for preventing generation of dust results in reduction of a recovery solution because of its leakage by a capillary phenomenon from the gap or recovery with pollutant taken from the outside area of an analysis area, contamination is diluted below a detection lower limit or a contamination recovery ratio is lowered because pipetting requires a predetermined amount of solution, and an analysis background value is increased or analysis in a desired analysis area cannot be carried out accurately.;SOLUTION: In this impurity recovery device, a semiconductor specimen is turned around the center of an analysis area. The recovery solution is collected after the recovery solution held by a recovery liquid drop holder is scanned in the center point and the periphery of the analysis area.;COPYRIGHT: (C)2004,JPO