TUNGSTEN THIN FILM APPLICATION METHOD USING TUNGSTEN OXIDE POWDER

摘要

PROBLEM TO BE SOLVED: To provide a tungsten thin film application method using tungsten oxide powder, which generates water as a product instead of toxic gas and enables a metal substrate to be coated with tungsten only using a furnace operating under a reduction atmosphere without expensive equipment.;SOLUTION: The method of applying a tungsten thin film on a metal substrate using tungsten oxide powder includes the steps of contacting the tungsten oxide powder with a metal substrate and carrying out thermal reduction treatment at a temperature of ≥650°C under a hydrogen atmosphere to apply the tungsten film on the metal substrate.;COPYRIGHT: (C)2004,JPO