Quantization manner of homogeneity of texture of polycrystal quality materials

摘要

The manner which quantizes the homogeneity of texture of the polycrystal quality materials is offered. As for this manner, the material which possesses step and the thickness which choose standard extremely direction or scanning the profile of the part of that with the fixed mark with the scanning-type direction image microscope, the average in each mark which was measured over step and the thickness which allocate the value of direction difference from standard polar direction of each crystal grain which was measured over step and seek the direction difference with standard polar direction and the material or actual polar direction of the many crystal grain of the part of that step and the thickness which obtain the actual extremely direction of the many crystal grain while that cutting over thicknessTexture gradient and/or it includes with the step which obtains the extent of the systematic parallel slit by seeking the primary or secondary derivative of the average direction difference in each mark which was measured over step and the thickness which seek direction difference. In addition, it offers also the system which quantizes the uniformity of texture of manner, and the polycrystal materials which forecast the sputtering efficiency of the target.