SURFACE CLEANLINESS EVALUATING METHOD AND SURFACE CLEANLINESS EVALUATING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a surface cleanliness evaluating method and a surface cleanliness evaluating device for easily evaluating surface cleanliness in a short period of time.;SOLUTION: In this surface cleanliness evaluating method, the cleanliness of a specimen surface is evaluated by using an electron probe microanalysis device. According to this method, a reflection electron image of the specimen surface picturized by the microanalysis device is visually checked to pinpoint a position where faint contrast exists and thereafter the number of fine particles existing in the position is counted to evaluate the surface cleanliness. The surface cleanliness evaluating device is equipped with the microanalysis device and used to evaluate surface cleanliness.;COPYRIGHT: (C)2004,JPO