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Strongly it has with electric field which consists of the porous semiconductor layer which inspection method of field emission type
Strongly it has with electric field which consists of the porous semiconductor layer which inspection method of field emission type
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机译:具有由电场发射型检查方法组成的多孔半导体层构成的强电场
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摘要
PROBLEM TO BE SOLVED: To provide a high performance field emission electron source and a method and a device for simply deciding the quality of the field emission electron source. SOLUTION: Electrons injected into an intense electric field drift layer 6 are accelerated and drifted without colliding with silicon microcrystals 63 by the electric field applied to silicon oxide films 64 and are emitted through a surface electrode 7. Performance of photoluminescence measurement by light excitation of the intense electric field drift layer 6 detects peaks of emission from the silicon microcrystals 63. In a defective article with small emission current, peaks of emission from the silicon microcrystals 63 are not detected.
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