PROBLEM TO BE SOLVED: To enable a user to easily see whether or not the inspection accuracy of an inspecting device is normal by comparing a numerical value obtained when a reference pattern is photographed by a photographic means with a reference value attached to a standard plate. ;SOLUTION: When a standard plate is supplied to a plate transferring part 2, the transferring part 2 is operated by a signal from a CPU 5, and the standard plate is transferred to a position below a photographing part 1. Then the photographing part 1 is operated by a signal from the CPU, and a standard pattern formed on the standard plate is photographed by a CCD camera 1a. The reference pattern on the standard plate, photographed by the camera 1a, is supplied to the CPU 5, which in turn computes its visibility. The pattern is then displayed 8 on a CRT, and the user can easily check the performance of a device by comparing the pattern with a reference value attached in advance.;COPYRIGHT: (C)1997,JPO
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