The accumulation capacity type device which has the hydrogen deterioration characteristic dielectric layer which is protected by getter layer

摘要

Being the accumulation device which includes the thin film capacitor which is formed from the 1st and 2nd electrode layer which is separated electrically by the dielectric layer which is formed from the chemical compound which is easy to deteriorate with hydrogen, it is the alloy of zirconium, vanadium and the iron, little manganese and/or among the metal of the group which consists of the alloy, zirconium and the iron, the cobalt and the nickel which contain the element of rare earth element family it is the alloy with 1 kinds at least in option, is highest in option and 15 weight % to the group which consists of the alloy which contains the element which belongs rare earth element familyThe accumulation device which features that at least one getter layer of the material inside furthermore is included is stated.