Available to the sensor in an environment of strong highly corrosive of ultrapure

摘要

Sensor capable of operating at a temperature of 400 ℃ or more is disclosed. The sensor of the present invention will function without a fluid filled, non-contaminating with non-porous, no metal component which is exposed to the outside. The sensor has a sensing diaphragm impermeable non-porous, which is placed in direct contact with the fluid in the environment of ultrapure. Surface of the non-porous is made of sapphire single crystal layer that is vitrified to the backing plate. Sensors of this invention is suitable for use in pressure transducers chemically inert to detect the temperature and / or pressure of the process fluid, may be molded directly into the high temperature plastic housing of the pressure transducer module possible.