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The stabilization zirconia thin film (ZrO 2 ) in the compound structure which grew in
The stabilization zirconia thin film (ZrO 2 ) in the compound structure which grew in
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机译:在纳米晶中生长的复合结构中的稳定氧化锆薄膜(ZrO 2)。
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摘要
PROBLEM TO BE SOLVED: To produce a stabilized zirconia film/c-Si laminated structure free from ion drift. ;SOLUTION: A thin stabilized zirconia (ZrO2) film 2 is grown on a single- crystalline silicon semiconductor substrate 1 to obtain the objective laminated structure. The zirconia film 2 contains about equal amts. of a stabilizer made of oxide of a metal whose valence is lower than 4 as the valence of Zr and an oxygen ion hole vanishing agent made of oxide of a metal whose valence is higher than 4.;COPYRIGHT: (C)1997,JPO
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