首页>
外国专利>
Usage of the pulse voltage in the plasma reactor
Usage of the pulse voltage in the plasma reactor
展开▼
机译:等离子体反应器中脉冲电压的使用
展开▼
页面导航
摘要
著录项
相似文献
摘要
While operating of the plasma reactor, in order it decreases or to remove adverse effect of the form electrification, or, between high tension electrical bias vibrating cycle of part, method and the device in order to offer the correct voltage spike to the pedestal of the semiconductor baseplate.
展开▼