CLEANING FLUID, METHOD FOR FORMING COLORED IMAGE, METHOD FOR PRODUCING COLOR FILTER, AND METHOD FOR PRODUCING COLOR-FILTER-FITTED ARRAY SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a cleaning fluid excellent in the ability to deterge dirt such as development residues and capable of giving a colored image good in surface smoothness and edge configuration and with high resolution, and the like.;SOLUTION: The cleaning fluid contains an alkyl ether surfactant and a basic compound and is applied to an object to be cleaned under elevated pressure conditions. Desirable embodiments include one wherein the pressure applied is 0.01-100 MPa, one wherein the pressure is applied by any one of pressure application means including a brush, a sponge and a liquid pressure, and one wherein the object to be cleaned is one prepared by forming at least a photosensitive layer and an oxygen barrier layer on a substrate in the given order.;COPYRIGHT: (C)2004,JPO