DEVELOPING SOLUTION, IMAGE FORMING METHOD, COLORED IMAGE FORMING METHOD, METHOD FOR PRODUCING COLOR FILTER, METHOD FOR PRODUCING ARRAY SUBSTRATE WITH COLOR FILTER AND METHOD FOR PRODUCING ARRAY SUBSTRATE WITH RESIN LAYER

摘要

PROBLEM TO BE SOLVED: To provide a developing solution having stable developing activity, excellent development accelerating property, developing particularly a photosensitive resin in a proper time, having excellent resolution and property of removing residue on development and having no adverse effect on the semiconductor characteristics of a semiconductor device such as TFT(thin film transistor).;SOLUTION: The developing solution contains at least one alkali agent selected from (A) phosphoric acid-base alkali agents, (B) silicic acid-base alkali agents, (C) carbonic acid-base alkali agents, (D) boric acid-base alkali agents, (E) amine-base alkali agents and (F) ammonium-base alkali agents and an alkylnaphthalene-base surfactant.;COPYRIGHT: (C)2003,JPO