Production manner null of NTC thermister, tip/chip die NTC thermister and temperature sense resistant thin film

摘要

PROBLEM TO BE SOLVED: To provide a chip thermistor with fast response to temperature sensitivity, low resistance and enhanced reliability by forming a temperature sensitive resistance wire including a La-Co-O based rare earth transition element as a principal component and providing a pair of electrodes so as to obtain continuity with the temperature sensitive resistance wire. ;SOLUTION: A temperature sensitive resistance wire 2 of a thermistor material is formed on the surface of an electrically insulating substrate 1 formed of an electrically insulating material by sputtering. A pair of external electrodes 5 are provided at both ends of a pair of electrodes (surface electrode) 3 formed on the surface of the temperature sensitive resistance wire 2, and a device in which the temperature sensitive resistance wire 2 and the surface electrode 3 is formed on the substrate 1 so as to obtain continuity with the surface electrode 3, and the surfaces of the temperature sensitive resistance wire 2 and the surface electrode 3 are coated with an insulating coating 6. Although the temperature sensitive resistance film is formed by sputtering, a thin film forming method such as alcoxide and the like, or a thick film forming method, for example, a method by which a thermistor material paste is coated and baked, and the like may be used.;COPYRIGHT: (C)2000,JPO