METHOD AND APPARATUS FOR MEASURING STRENGTH OF BASE MATERIAL SURFACE LAYER

摘要

PROBLEM TO BE SOLVED: To provide a method and apparatus for measuring strength of a base material surface layer that accurately measures even in the case of a base material having a local minute region, a three-dimensional shape or an uneven surface with a gurge formed thereon. ;SOLUTION: The apparatus includes a pressure detector for detecting cutting resistance Fh generated by a cutter 7 cutting a measured surface of a base material 11 fixed on a support, a measuring device for detecting an internal cut amount d, and a means for adjusting cutting speeds Vh and Vv. From an image photographed by a CCD camera, at least one of an opening length, an opening displacement, and a curvature radius of a chip generated when the cutter 7 cuts the base material surface layer is calculated. An energy release rate is obtained from at least one of the measurements and the cut resistance Fh generated by the cutter 7. Based on the energy release rate, release strength of the base material surface layer is calculated.;COPYRIGHT: (C)2004,JPO