Method for manufacturing polycrystalline silicon thin film and thin film transistor fabricated using polycrystalline silicon thin film manufactured by the manufacturing

摘要

A method of manufacturing polycrystalline silicon thin film using a laser beam to crystallize amorphous silicon thin film, the method including overlappingly irradiating the laser beam onto a region wider than 0.5 &mgr;m when crystallizing the amorphous silicon thin film.