首页>
外国专利>
Thin-film micromachine resonator, thin-film micromachine resonator gyroscope, navigation system using the thin-film micromachine resonator gyroscope, and automobile
Thin-film micromachine resonator, thin-film micromachine resonator gyroscope, navigation system using the thin-film micromachine resonator gyroscope, and automobile
展开▼
机译:薄膜微机械谐振器,薄膜微机械谐振器陀螺仪,使用该薄膜微机械谐振器陀螺仪的导航系统以及汽车
展开▼
页面导航
摘要
著录项
相似文献
摘要
A thin film micromechanical resonator (resonator) having improved drive efficiency, a resonator gyro having improved sensitivity in detecting an angular velocity, and a navigation system and an automobile using the resonator gyro. The resonator includes a tuning fork structure made of a non-piezoelectric material, and a first electrode and a second electrode disposed respectively at the inner side and the outer side of the tuning fork arm. On the first and second electrodes, a first piezo film and a second piezo film are provided respectively, and a third electrode and a fourth are respectively provided electrode thereon. When an alternating voltage is applied to the third and fourth electrodes at the opposite phases each other, the tuning fork resonates in the direction perpendicular to the center line. The resonator gyro detects, at the sensing section which is formed of another electrodes and another piezo film, the Coriolis force generated in proportion to angular velocity given to the resonator.
展开▼