Edge-anchored mode-matched micromachined gyroscopic disk resonator

摘要

This paper reports on a vacuum packaged circular disk gyroscopic resonator with T-shape anchors fabricated in a (100) single crystalline silicon substrate. This device topology simplifies the fabrication process as compared to previous approaches to realize center-anchored disk gyroscopes. Mode-matching of the trigonal modes of the disk is realized with open-loop characterization results demonstrating a Quality factor exceeding 1.5 million with an initial modal frequency split of 4.7 Hz and a natural frequency of approximately 0.976 MHz (4.81 ppm split). An approach to effective mode matching of such devices is described.