Fluorine-containing compounds, fluorine-containing polymerizable monomers, fluorine-containing polymers, dissolution inhibitors, and resist compositions

摘要

The invention relates to a fluorine-containing compound containing a substituent represented by the formula 1: chemistry chemdraw filechemistry mol file;where R¹ is (a) a straight-chain or branched alkyl or alkylene group, (b) a cyclic structure containing an aromatic ring group or aliphatic cyclic group, or (c) a substituent containing an aromatic ring group and an aliphatic cyclic group, and R¹ optionally contains fluorine, another halogen, CN, oxygen, nitrogen, silicon, or alcohol, and ;R² is a hydrogen atom, a straight-chain or branched alkyl group, an aromatic group, or a hydrocarbon group optionally containing an aliphatic cyclic group, and R² optionally contains fluorine, oxygen, nitrogen, carbonyl bond, or alcohol, and a plural number of R² having different structures are optionally contained in the molecule.