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Digital video based array detector for parallel process control and radiation driver for micro-scale devices
Digital video based array detector for parallel process control and radiation driver for micro-scale devices
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机译:用于并行过程控制的基于数字视频的阵列检测器和用于微型设备的辐射驱动器
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摘要
Invention discloses apparatus for parallel monitoring and control of arrays of similar processes. Method and apparatus for metrological control of planar arrays of micro-devices. Method and apparatus for remote radiation driver that actuates large linear and planar arrays of micro and nano devices. Methods include control of micro stamps arrays and arrays of microcantilevers.
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