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Characterizing in-situ deformation of hard pellicle during fabrication and mounting with a sensor array
Characterizing in-situ deformation of hard pellicle during fabrication and mounting with a sensor array
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机译:在制造和安装传感器阵列期间表征硬质薄膜的原位变形
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摘要
A system comprising a reticle, a pellicle and a plurality of sensors attached to at least one of the reticle or pellicle. The sensors are configured to sense in-situ strains on the pellicle as the pellicle is mounted to the reticle or frame.
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