Pattern writing method capable of preventing or reducing an error between design dimensions and finished dimensions of a pattern

摘要

When a unit figure (F1) is divided by a provisional stripe boundary (C12) into a first portion (F1₁) and a second portion (F1₂), and besides, when width (W1) of the first portion (F1₁) is smaller than a predetermined threshold value (0.40 &mgr;m), the provisional stripe boundary (C12) is partly shifted in a position where the unit figure (F1) is described such that the first portion (F1₁) belongs to a provisional stripe region (R2). That is, provisional stripe regions (R1, R2) are corrected to obtain formal stripe regions (R1a, R2a). As a result, the unit figure (F1) belongs to the formal stripe region (R2a) as a whole. The writing section 3 then writes a pattern on a target of writing (6) based on pattern data (D2) in which the formal stripe regions (R1a, R2a) are defined.