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Fingerprint sensor having a portion of the fluorocarbon polymer physical interface layer amorphized
Fingerprint sensor having a portion of the fluorocarbon polymer physical interface layer amorphized
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机译:指纹传感器的一部分碳氟聚合物物理界面层已非晶化
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摘要
A touch-sensitive semiconductor chip having a physical interface to the environment, where the surface of the physical interface is coated with a fluorocarbon polymer. The polymer is highly scratch resistant and has a characteristic low dielectric constant for providing a low attenuation to electric fields. The polymer can be used instead of conventional passivation layers, thereby allowing a thin, low dielectric constant layer between the object touching the physical interface, and the capacitive sensing circuits underlying the polymer.
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