首页> 外国专利> Near-field optical probe having cantilever and probe formed of transparent material, method for manufacturing near-field optical probe, and optical apparatus having near-field optical probe

Near-field optical probe having cantilever and probe formed of transparent material, method for manufacturing near-field optical probe, and optical apparatus having near-field optical probe

机译:具有悬臂的近场光学探针和由透明材料形成的探针,近场光学探针的制造方法以及具有近场光学探针的光学设备

摘要

A near-field optical probe has a cantilever formed of a transparent material and having a first main surface and a second main surface opposite the first main surface. A base supports the cantilever at the first main surface. A tip extends from the second main surface of the cantilever and has a microscopic aperture at an end thereof. The tip is formed of a transparent material having a higher refractive index than that of the transparent material of the cantilever to increase an amount of near-field light generated or detected by the microscopic aperture. A shade film is formed on the second main surface of the cantilever and on a surface of the tip except for the microscopic aperture.
机译:近场光学探针具有由透明材料形成的悬臂,该悬臂具有第一主表面和与第一主表面相对的第二主表面。基座在第一主表面处支撑悬臂。尖端从悬臂的第二主表面延伸并且在其端部具有微观孔。尖端由具有比悬臂的透明材料的折射率高的折射率的透明材料形成,以增加由微孔产生或检测的近场光的量。遮蔽膜形成在悬臂的第二主表面上和尖端的除微观孔径之外的表面上。

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