Micro-magnetoelastic biosensor array for detection of DNA hybridization and fabrication method thereof

摘要

The present invention provides a micro-magnetoelastic biosensor array for detection of the hybridization of target DNA and a method of fabricating such biosensor arrays. The biosensor array activate the magnetoelastic biosensors vibrated by an AC magnetic field, thus simply and quickly analyzing genetic materials as well as obtaining a large amount of evolving information through a real-time solution monitoring of the DNA immobilization and hybridization processes, without labeling the target sample using radioactive isotopes, enzymes or fluorescent dyes. The method of fabricating the biosensor array comprises the steps of: depositing a silicon nitride film on a lower surface of a silicon wafer, and depositing a tungsten thin film on a top surface of the silicon wafer through a sputtering technique; depositing a magnetoelastic sensor material film on a top surface of the tungsten thin film; patterning the magnetoelastic sensor material film into a predetermined shape through a photolithographic technique; depositing a gold layer for DNA immobilization on a top surface of the patterned magnetoelastic sensor material film through a sputtering technique; depositing a tungsten capping layer through a sputtering technique; patterning the deposited tungsten thin film; etching the silicon wafer in a solution; and removing the tungsten capping layer.