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Synchrotron radiation measurement apparatus, X-ray exposure apparatus, and device manufacturing method

机译:同步辐射线测量装置,x射线曝光装置以及装置的制造方法

摘要

A measurement apparatus has a first detector for measuring an intensity such that a sheet-shaped beam of synchrotron radiation is integrated over the entire range of the beam in the thickness direction thereof; a second detector for measuring the intensity of the beam at two points where positions along the direction are different; and a calculating device for calculating the magnitude of the beam in the direction on the basis of the detections by the first and second detectors.
机译:一种测量设备,其具有:第一检测器,其用于测量强度,使得片状的同步加速器辐射束在其厚度方向上的整个范围上被积分;第二检测器,用于在沿方向的位置不同的两个点处测量光束的强度;计算装置,用于基于第一检测器和第二检测器的检测来计算光束在该方向上的大小。

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