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Method of depicting a pattern with electron beam and method of producing disc-like substrate carrying thereon a pattern depicted with electron beam
Method of depicting a pattern with electron beam and method of producing disc-like substrate carrying thereon a pattern depicted with electron beam
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机译:用电子束描绘图案的方法以及在其上承载用电子束描绘图案的盘状基板的方法
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摘要
A resist layer formed on a disc-like substrate is exposed to an electron beam in a desired pattern to depict a desired pattern on the resist layer. The desired pattern is depicted by oscillating back and forth, in directions intersecting the circumferential direction of the disc-like substrate, an electron beam smaller in its beam diameter than the minimum width of the pattern while rotating the substrate in one direction.
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